Fire at ASML can affect the manufacture of the world’s circuits

Advanced Semiconductor Materials Lithography (ASML) is a company based in the Netherlands and by far the largest in the world in semiconductor manufacturing equipment. In a time of great shortage of circuits, the company now claims that it burned during the night in a factory in Berlin, Germany, where components for lithographic machines used for the manufacture of circuits are manufactured.

At this point it is too early to make any statement on the damage or whether the incident will have any impact on the output plan for this year. It will take a few days to conduct a thorough investigation and make a full assessment. As soon as we have such assessment, we will provide an update.

ASML Berlin manufactures components for ASML’s lithography systems, including wafer tables and clamps, reticle chucks and mirror blocks. ASML acquired Berliner Glas in 2020.

In a letter It appears that no employees were injured during the fire and that ASML will take the next few days to investigate the impact on production for the full year 2022. According to the company, it is too early to make any statements on the matter, and instead promises more information as soon as they have made a “full assessment”.


ASML is today alone in making machines for Extreme Ultraviolet Lithography (EUV), an optical lithographic technology that uses ultraviolet radiation at a wavelength of 13.5 nanometers. Before ASML, after many years of delays, managed to deliver EUV tools, the most advanced argon fluoride laser (ArF) used for ultraviolet light at a wavelength of 193 nanometers.

With ArF, after many years of problems, Intel managed to manufacture circuits of 10 nanometers, which corresponds to TSMC’s 7 nanometers, which in the first generation also used ArF. Using EUV tools is seen as absolutely crucial for more advanced and transistor-dense technologies, such as Intel 7 and TSMC’s 5 nanometers and down, and so far ASML has a monopoly on the technology.

Source: SweClockers by

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